VSM72 – Smartline™ Vacuum Transducer

VSM72Smartline Vacuum Transducer
VSM72Smartline Vacuum Transducer

Absolute Pressure 1000 mbar to 5 x 10-9 mbar (=hPa), 750 Torr to 5 x 10-9 Torr

The compact VSM72 Pirani/cold cathode combination transducer measures absolute pressure from atmosphere to ultrahigh vacuum.

The intelligent, micro processor driven Smartline transducers automatically control the appropriate interaction of both vacuum sensors regarding measurement ranges and switching points to achieve high accuracy.

Benefits

  • Combination sensor with wide measuring range
  • Patented pulsed Pirani sensor with extended range allows operation of the cold cathode at lower pressure and increase of lifetime
  • Robust cold cathode sensor, insensitive against inrush of air
  • Logarithmic signal output 0 – 10 V and RS485 interface
  • Replaceable sensor head
  • Excellent ignition behavior
  • Correct pressure readings by means of separate gas type correction factors for Pirani and cold cathode sensors
  • Two independent, dry relay switch points

Typical Applications

  • Analysis instruments
  • Coating plants and vapor deposition
  • Mass spectrometry
  • Process engineering
  • Sputtering plants
  • Vacuum furnaces
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Product Specifications:
  • Measuring Principle Heat conduction (Impulse Pirani),
  • cold cathode: inverted magnetron, both depending on gas type
  • Material In Contact With Vacuum Stainless steel 1.4307, nickel, tungsten, molybdenum, glass
  • Measurement Range 1000 – 5 x 10-9 mbar (750 – 5 x 10-9 Torr),max. overpressure 4 bar abs.
  • Accuracy 1000 – 20 mbar: < 30 % from reading
  • 20 – 5 x 10-3 mbar: < 10 % from reading
  • 5 x 10-3 mbar – 1 x 10-7 mbar: < 25% from reading
  • Repeatability 5%
  • Response Time 200 ms, 500 ms for activating the cold cathode
  • Cathode Voltage Max. 2.5 kV
  • Voltage Supply 19 – 30 VDC
  • Electrical Connection Sub-D, 15-pole, male
  • Power Consumption Approx. 2.5 W (without switch points)
  • Operating Temperature +5…+50C
  • Storage Temperature -20…+70C
  • Maximum Bake Out Temperature 150C at flange (electronic detached)
  • Output Signal 0 – 10 VDC, measuring range 1.8 – 8.6 VDC, logarithmic, 0.6 V per decade
  • Serial Interface RS485: 9600 baud, address switch
  • Switch Points 2 switch-over relays, 60 V, 0.5 A
  • Vacuum Connection Stainless steel flange DN 25-KF (VSM72MV),
  • Stainless steel conflat flange DN 40 CF (VSM72MVCF)
  • Protection Class IP40
  • Weight Approx. 570 g